简介
EddyCus® map IK 是一款由三大模块组成的映射集成套件。其核心为传感器套件，包含涡流传感器、测量电子单元及控制单元。根据客户需求，系统可配置为透射模式（样品上下各一个传感器）或反射模式（单传感器置于样品上方或下方）。传感器套件可根据需要集成至客户已有的运动系统，也可搭配 SURAGUS 专用高性能运动模块使用。
选用 SURAGUS 运动模块时，可直接使用配套软件——该软件已内置高级测量功能、配方管理和预定义运动控制。客户也可自主开发应用软件：运动控制通过 OPC UA 接口与 PLC 系统对接，测量电子单元则通过 REST API 访问。
- 基础模块 — 传感器映射套件
- 运动模块
- 集成至客户现有运动系统
- SURAGUS 高性能运动平台
- 软件模块
- 基于 SURAGUS MAP Core 的客户定制集成
- SURAGUS MAP 映射应用程序
高频涡流映射解决方案，实现方块电阻、电阻率和电导率的非接触式精密测量。请根据您的应用需求，选择最合适的集成方案。
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MAP IK 传感器映射套件
EddyCus® map IK 传感器映射套件是一款不含运动硬件的纯传感器方案，基于非接触式涡流传感器，特别适用于导电层和基材的电学表征。测量能力涵盖：
- 方块电阻：0.05 mΩ/sq 至 300,000 Ω/sq
- 导电层厚度：1 nm 至 100 µm
- 电阻率：0.1 至 1,000 mΩ·cm
根据应用需求，提供以下三种传感器配置：
- 透射模式 — 传感器间隙可达 25 mm
- 反射模式
- 上置传感器配置，尤其适用于晶棒
- 下置传感器配置，尤其适用于晶块
传感器可通过多种安装方式集成至您的现有映射系统，STEP 三维数据可应要求提供。
如您尚未配备运动平台，请参阅下方高性能运动模块章节，或直接联系我们了解更多选型方案。
SURAGUS 运动模块
映射集成套件的高性能运动平台
高性能运动平台是在扫描速度和测量精度方面的极致方案。
| SURAGUS 高性能运动模块 | |
| 驱动技术 | 直线电机 |
| 位置反馈精度 | 极高 |
| 边缘排除区 | ≤1 mm |
| 运动速度 | 最高 600 mm/s |
| 初始化过程 | 即刻扫描，无需回零 |
| 轴运动方式 | X/Y 轴同步联动 |
| 扫描路径 | 支持复杂高效路径（得益于同步联动） |
| 维护需求 | 几乎免维护（每 500,000 km 润滑一次） |
| Reflection Mode Accuracy |
±2 % via lift off compensation
±1 % through active piezo distance adaption |
SURAGUS 映射集成软件套件
SURAGUS 映射集成软件套件是先进涡流映射的核心软件平台，涵盖从数据采集到结果可视化的完整工作流程，助力将 SURAGUS 系统无缝集成至现有生产环境。
- SURAGUS 映射集成软件套件包含：
- SURAGUS MAP Core 驱动程序
- 从 SURAGUS 传感器映射套件采集测量数据
- 执行数据处理，例如边缘效应补偿（EEC）评估或推导电阻率等派生参数
- 可独立驱动，支持客户自主开发上层应用
- SURAGUS MAP 映射应用程序（可选）
- 在直观的前端界面中展示测量结果，提供详细的分布图和统计分析
- 采用现代 Python 代码实现，支持未来功能扩展，已集成：
- 配合基恩士（KEYENCE）共聚焦传感器进行 2D TTV 评估
- 集成客户自有的第三方软件开发工具包（SDK）
- 提供 REST API 接口，上层系统可触发测量任务、获取结果，将 SURAGUS 数据直接嵌入现有过程控制或质量管理系统
- SURAGUS MAP Core 驱动程序
Map IK – Performance
传感器 + 高性能运动模块-
涡流传感器
-
控制单元
-
晶圆、晶块或晶棒
-
REST API 接口
-
三轴直线电机
-
最高速度（≤600 mm/s）
-
最佳边缘排除（≤1 mm）
-
智能扫描路径
-
即刻测量，无需回零
-
完整前端软件
发送咨询
适合需要具备最佳测量性能的完整硬件方案的企业
最佳选择
Map IK
完整交钥匙方案 ★ 最佳选择-
涡流传感器
-
控制单元
-
晶圆、晶块或晶棒
-
REST API 接口
-
三轴直线电机
-
最高速度（≤600 mm/s）
-
最佳边缘排除（≤1 mm）
-
智能扫描路径
-
即刻测量，无需回零
-
完整前端软件
发送咨询
适合需要开箱即用的完整软硬件解决方案的企业 ★ 最省心之选
极少努力
EddyCus® map IK 技术参数
传感器映射套件 — 测量能力
| 透射模式传感器配置 | |
|---|---|
| 方块电阻测量范围 | 0.05 mOhm/sq – 300,000 Ohm/sq | 反射模式传感器配置 |
| 电阻率测量范围 | 0.1 – 1,000 mOhm·cm |
| 电导率测量范围 0.01 - 65 MS/m | |
| 方块电阻测量范围 | 0.05 – 100 Ohm/sq | 通用功能 |
| Calibration package | A variety of sheet resistance or resistivity reference standards are available at SURAGUS |
| Encoder input |
ASU Gen1 case: NO
ASU Gen2 case: up to 3x (A/B/Z) via internal Trigger Board |
| TTL | ASU Gen1 case: 2x Trigger count + Reset Edge Mode for PTP-applications Trigger rate up to 3kH |
| Software trigger | Included |
| SURAGUS MAP Core |
Path planing PLC module
Rest-API to SURAGUS MAP Core OPC UA or others to PLC SECS GEM (E30) |
Movement Features
| Standard Movement | Performance Movement | |
| Base plate | Stable table with a maximum scanning area of 320 x 320 mm base plate ensures mechanical rigidity, and an integrated electronic board behind the actuators hosts the electronic components An optional third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans. | |
| Housing | No housing included | |
| Location of electronic components | On e-board behind actors | |
| Measurement IPC | ASU control unit to run optional application front end | |
| Number of axis | Up to 3
third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans.
|
|
| SURAGUS Movement Modules | PLC code included | |
| SURAGUS MAP Core |
OPC UA or others to PLC
SECS GEM (E30) |
|
| Secondary measurement methodologies | Customer integrated secondary SDKs | |
| Substrates | Wafer, pucks and boules with 2 inch – 300 mm diameter | |
| Technology | Stepper motors | Linear motors |
| Position Precision Feedback | High | Very High |
| Edge Exclusion | 3 – 5 mm | ≤1 mm |
| Movement Speed | Up to 150 mm/s | Up to 600 mm/s |
| Initalization Process | Homing process for each imaging | Instantly ready to scan (no homing process necessary) |
| Axle Movement | Sequential movement of x and y axis | Synchronious movement of x and y axis |
| Scanning Path | Simple meander mode | Complex but efficient paths are possible (due to synchronious movement) |
| Maintenance | Lubrication once a year | Practically no maintenance (lubrication every 500,000 km) |
| Reflection Mode Accuracy | ±3 % via lift off compensation |
±2 % via lift off compensation
±1 % through active piezo distance adaption |
| Performance Movement | ||
| Base plate | Stable table with a maximum scanning area of 320 x 320 mm base plate ensures mechanical rigidity, and an integrated electronic board behind the actuators hosts the electronic components An optional third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans. | |
| Housing | No housing included | |
| Location of electronic components | On e-board behind actors | |
| Measurement IPC | ASU control unit to run optional application front end | |
| Number of axis | Up to 3
third axis enables motion in the z direction. This is particularly useful for RMT versions and is available either as a simple z axis or as a closed loop controlled axis for automatic distance adjustment during reflection mode scans.
|
|
| SURAGUS Movement Modules | PLC code included | |
| SURAGUS MAP Core |
OPC UA or others to PLC
SECS GEM (E30) |
|
| Secondary measurement methodologies | Customer integrated secondary SDKs | |
| Substrates | Wafer, pucks and boules with 2 inch – 300 mm diameter | |
| 驱动技术 | 直线电机 | |
| 位置反馈精度 | 极高 | |
| 边缘排除区 | ≤1 mm | |
| 运动速度 | 最高 600 mm/s | |
| 初始化过程 | 即刻扫描，无需回零 | |
| 轴运动方式 | X/Y 轴同步联动 | |
| 扫描路径 | 支持复杂高效路径（得益于同步联动） | |
| 维护需求 | 几乎免维护（每 500,000 km 润滑一次） | |
| Reflection Mode Accuracy |
±2 % via lift off compensation
±1 % through active piezo distance adaption |
|
SURAGUS Mapping Application Addon
| Compatible with | SURAGUS Performance Movement Module |
| Measurement acquisition | Included |
| Data processing |
Edge effect compensation algorythm (EEC) included
Derive other measures like resistivity |
| Display data | Front end |
索取报价
您可以使用此表格给我们留言。
